GaSonics L3510 Downstream Microwave Plasma Photoresist Removal System We can refurbish your system or sell you one of ours We also sell refurbished Zbot 2 robots All systems are remanufactured as follows: Hardware compatible for 75-200mm wafers, configured for six or eight inch wafers at customer's specification Single cassette processing Downstream plasma process, no wafer radiation damage All new Quartz ware: Chamber, bubbler, diffuser, lamp plate, Spool, Collar and gas distribution plate New gas box New valves and air cylinders All new o-rings. New heated platen New lamp assembly Automatic photoemission type end-point detection Refurbished Brooks Zbot 2 pick and place robot Transfer 200 wafers using N2 plasma process without error Refurbished microwave generator Calibrated Microwave system, pressure system and Temp control Upgraded Pentium CPU card cage Software version 7.32 or higher LCD display upgrade (eliminates three high voltage PC boards used in old display) New MKS throttle valve Three gas inputs with refurbished MFC's Systems can be demonstrated prior to ship   home | background | services | components | contact | GaSonics    ©2006 Evergreen Solutions, Inc. - All Rights Reserved.